Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12406777 | Optical element for a EUV projection exposure system | Hartmut Enkisch, Sandro Hoffmann, Joern WEBER, Sebastian Strobel, Mirko Ribow +2 more | 2025-09-02 |
| 7992910 | Robot structure | Ulrich Seibold, Ulrich Hagn | 2011-08-09 |