Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270127 | Synchronized pulses identify and locate targets rapidly | — | 2022-03-08 |
| 10769447 | Synchronous convergent pulses reduce dimensions of serial surfaces | — | 2020-09-08 |
| 9063336 | Optical element having a plurality of reflective facet elements | Martin Endres, Damian Fiolka, Joachim Hartjes | 2015-06-23 |
| 8587767 | Illumination optics for EUV microlithography and related system and apparatus | Damian Fiolka, Berndt Warm, Christian Steigerwald, Martin Endres, Ralf Stuetzle +6 more | 2013-11-19 |
| 8395754 | Illumination optical unit for EUV microlithography | Martin Endres, Sebastian Doern, Stig Bieling | 2013-03-12 |