SD

Sebastian Doern

CG Carl Zeiss Smt Gmbh: 1 patents #657 of 1,189Top 60%
📍 Oberkochen, DE: #233 of 377 inventorsTop 65%
Overall (All Time): #3,151,034 of 4,157,543Top 80%
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Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8395754 Illumination optical unit for EUV microlithography Martin Endres, Stig Bieling, Marc Kirch 2013-03-12