Issued Patents All Time
Showing 76–83 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6243206 | Illuminating system for vacuum ultraviolet microlithography | — | 2001-06-05 |
| 6198793 | Illumination system particularly for EUV lithography | Jorg Schultz, Karl-Heinz Schuster, Udo Dinger | 2001-03-06 |
| 5982558 | REMA objective for microlithographic projection exposure systems | Gerd Furter, Udo Dinger, Gerhard Ittner | 1999-11-09 |
| 5675401 | Illuminating arrangement including a zoom objective incorporating two axicons | Gerald Richter | 1997-10-07 |
| 5646715 | Illuminating arrangement for an optical system having a reticle masking unit | — | 1997-07-08 |
| 5572287 | Illuminating arrangement for a projection microlithographic exposure apparatus | Gerhard Ittner | 1996-11-05 |
| 5343489 | Arrangement for shaping a laser beam and for reducing the coherence thereof | — | 1994-08-30 |
| 5041862 | Lens screen | Dieter Rossman | 1991-08-20 |