Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8365104 | Original data producing method and original data producing program | — | 2013-01-29 |
| 8321815 | Recording medium storing original data generation program, original data generation method, original fabricating method, exposure method, and device manufacturing method | Tokuyuki Honda | 2012-11-27 |
| 8243282 | Interferometric shape measurement of different signs of curvature | Yuki Oshima | 2012-08-14 |
| 8239787 | Method of generating original plate data by repeatedly calculating approximate aerial image | — | 2012-08-07 |
| 8163448 | Determination method, exposure method, device fabrication method, and storage medium | Manabu Hakko | 2012-04-24 |
| 8059262 | Calculation program, and exposure method for calculating light intensity distribution formed on image plane | — | 2011-11-15 |
| 7821648 | Measurement method, a measurement apparatus, and a computer-readable recording medium | Yuki Oshima | 2010-10-26 |
| 7761840 | Mask data generation including a main pattern and an auxiliary pattern | — | 2010-07-20 |
| 7675629 | Exposure apparatus and device manufacturing method using a common path interferometer to form an interference pattern and a processor to calculate optical characteristics of projection optics using the interference pattern | Yumiko Ohsaki, Yasuhiro Sawada, Seiji Takeuchi | 2010-03-09 |
| 7657865 | Computer-readable recording medium recording a mask data generation program, mask data generation method, mask fabrication method, exposure method, and device manufacturing method | — | 2010-02-02 |
| 7586626 | Measurement method, exposure method, exposure apparatus, and device fabrication method | — | 2009-09-08 |
| 7573563 | Exposure apparatus and device manufacturing method | Seiji Takeuchi, Akiyoshi Suzuki | 2009-08-11 |
| 7508493 | Exposure apparatus and device manufacturing method | Seiji Takeuchi, Yumiko Ohsaki, Minoru Yoshii | 2009-03-24 |
| 7414240 | Particle remover, exposure apparatus having the same, and device manufacturing method | Akinori Ohkubo, Hiroshi Osawa | 2008-08-19 |
| 7399558 | Mask and manufacturing method thereof and exposure method | Kenji Saitoh | 2008-07-15 |
| 7379151 | Exposure apparatus comprising cleaning apparatus for cleaning mask with laser beam | Hiroshi Osawa, Akinori Ohkubo | 2008-05-27 |
| 7359033 | Exposure method and apparatus | — | 2008-04-15 |
| 7317511 | Light modulator, and optical apparatus using the same | — | 2008-01-08 |
| 7217503 | Exposure method and apparatus | Kenji Saitoh, Akiyoshi Suzuki | 2007-05-15 |
| 7214453 | Mask and its manufacturing method, exposure, and device fabrication method | Kenji Saitoh, Akiyoshi Suzuki | 2007-05-08 |
| 7107573 | Method for setting mask pattern and illumination condition | Akiyoshi Suzuki, Kenji Saitoh | 2006-09-12 |
| 7009686 | Exposure method | Miyoko Kawashima | 2006-03-07 |
| 6968529 | Phase shift mask, and exposure method and device manufacturing method using the same | — | 2005-11-22 |
| 6839890 | Mask manufacturing method | Mitsuro Sugita, Kenji Saitoh | 2005-01-04 |