Issued Patents All Time
Showing 26–44 of 44 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5157700 | Exposure apparatus for controlling intensity of exposure radiation | Hiroshi Kurosawa, Mitsuaki Amemiya, Shigeru Terashima, Koji Uda, Shunichi Uzawa +6 more | 1992-10-20 |
| 5131022 | Exposure method and apparatus | Shigeru Terashima, Mitsuaki Amemiya, Shunichi Uzawa, Takao Kariya | 1992-07-14 |
| 5063582 | Liquid cooled X-ray lithographic exposure apparatus | Tetsuzo Mori, Eiji Sakamoto, Shinichi Hara, Koji Uda, Shunichi Uzawa +1 more | 1991-11-05 |
| 5026239 | Mask cassette and mask cassette loading device | Yuji Chiba, Hidehiko Fujioka, Nobutoshi Mizusawa, Takao Kariya | 1991-06-25 |
| 5008703 | Exposure apparatus and control of the same | Eigo Kawakami, Kunitaka Ozawa, Koji Uda, Shunichi Uzawa | 1991-04-16 |
| 5001734 | SOR exposure system | Koji Uda, Yutaka Tanaka, Tetsuzo Mori, Shunichi Uzawa | 1991-03-19 |
| 4994708 | Cold cathode device | Akira Shimizu, Takeo Tsukamoto, Akira Suzuki, Masao Sugata, Masahiko Okunuki | 1991-02-19 |
| 4990771 | Scanning optical apparatus having focus position detector | Kazuo Minoura | 1991-02-05 |
| 4974736 | Multi-electron-beam pattern drawing apparatus | Masahiko Okunuki, Mitsuaki Seki, Mamoru Miyawaki, Takeo Tsukamoto, Akira Suzuki +2 more | 1990-12-04 |
| 4969168 | Wafer supporting apparatus | Eiji Sakamoto, Shinichi Hara, Shunichi Uzawa | 1990-11-06 |
| 4904895 | Electron emission device | Takeo Tsukamoto, Mamoru Miyawaki, Tetsuya Kaneko, Akira Suzuki, Toshihiko Takeda +1 more | 1990-02-27 |
| 4897552 | Multi-electron-beam pattern drawing apparatus | Masahiko Okunuki, Mamoru Miyawaki, Takeo Tsukamoto, Akira Suzuki, Tetsuya Kaneko +2 more | 1990-01-30 |
| 4894611 | System for measuring characteristics of electron emitting sources | Mamoru Miyawaki, Akira Suzuki, Tetsuya Kaneko, Takeo Tsukamoto, Toshihiko Takeda +1 more | 1990-01-16 |
| 4833507 | Electron emission device | Akira Shimizu, Takeo Tsukamoto, Akira Suzuki, Masao Sugata, Masahiko Okunuki | 1989-05-23 |
| 4824218 | Optical modulation apparatus using ferroelectric liquid crystal and low-resistance portions of column electrodes | Mitsutoshi Kuno, Masahiko Enari, Hitoshi Shindo, Seishiro Yoshioka, Shuzo Kaneko +1 more | 1989-04-25 |
| 4825082 | Electron emitting apparatus | Masahiko Okunuki, Takeo Tsukamoto, Akira Shimizu, Akira Suzuki, Masao Sugata | 1989-04-25 |
| 4820930 | Photomask positioning device | Shinji Tsutsui | 1989-04-11 |
| 4810934 | Electron emission device | Takeo Tsukamoto, Akira Shimizu, Akira Suzuki, Masao Sugata, Masahiko Okunuki | 1989-03-07 |
| 4569562 | Method of and apparatus for controlling a fluid bearing | Mitsuya Sato | 1986-02-11 |