Issued Patents All Time
Showing 25 most recent of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7550180 | Plasma treatment method | Toshiyasu Shirasuna, Tatsuyuki Aoike, Kazuyoshi Akiyama, Takashi Otsuka, Daisuke Tazawa +2 more | 2009-06-23 |
| 7051671 | Vacuum processing apparatus in which high frequency powers having mutually different frequencies are used to generate plasma for processing an article | Makoto Aoki, Toshiyasu Shirasuna, Hiroaki Niino, Kazuyoshi Akiyama, Shinji Tsuchida +2 more | 2006-05-30 |
| 6946167 | Deposited film forming apparatus and deposited film forming method | Kazuto Hosoi, Toshiyasu Shirasuna, Kazuhiko Takada, Ryuji Okamura, Kazuyoshi Akiyama | 2005-09-20 |
| 6861373 | Vacuum processing method and semiconductor device manufacturing method in which high-frequency powers having mutually different frequencies are applied to at least one electrode | Makoto Aoki, Toshiyasu Shirasuna, Hiroaki Niino, Kazuyoshi Akiyama, Shinji Tsuchida +2 more | 2005-03-01 |
| 6849123 | Plasma processing method and method for manufacturing semiconductor device | Hiroaki Niino, Toshiyasu Shirasuna, Makoto Aoki | 2005-02-01 |
| 6761128 | Plasma treatment apparatus | Toshiyasu Shirasuna, Tatsuyuki Aoike, Kazuyoshi Akiyama, Takashi Otsuka, Daisuke Tazawa +2 more | 2004-07-13 |
| 6702898 | Deposited film forming apparatus | Kazuto Hosoi, Toshiyasu Shirasuna, Kazuhiko Takada, Ryuji Okamura, Kazuyoshi Akiyama | 2004-03-09 |
| 6696108 | Vacuum processing method | Toshiyasu Shirasuna, Hiroaki Niino, Makoto Aoki | 2004-02-24 |
| 6649020 | Plasma processing apparatus | Ryuji Okamura, Tatsuyuki Aoike, Toshiyasu Shirasuna, Kazuhiko Takada, Kazuyoshi Akiyama | 2003-11-18 |
| 6486045 | Apparatus and method for forming deposited film | Takashi Otsuka, Tatsuyuki Aoike, Toshiyasu Shirasuna, Kazuyoshi Akiyama, Daisuke Tazawa +1 more | 2002-11-26 |
| 6443191 | Vacuum processing methods | Tatsuyuki Aoike, Toshiyasu Shirasuna, Kazuyoshi Akiyama, Takashi Ohtsuka, Daisuke Tazawa +2 more | 2002-09-03 |
| 6435130 | Plasma CVD apparatus and plasma processing method | Satoshi Takaki, Yoshio Segi, Atsushi Yamagami, Hiroyuki Katagiri, Yasuyoshi Takai | 2002-08-20 |
| 6413592 | Apparatus for forming a deposited film by plasma chemical vapor deposition | Ryuji Okamura, Toshiyasu Shirasuna, Kazuhiko Takada, Kazuyoshi Akiyama | 2002-07-02 |
| 6350497 | Plasma processing method | Toshiyasu Shirasuna, Ryuji Okamura, Kazuyoshi Akiyama, Takashi Ohtsuka, Kazuto Hosoi | 2002-02-26 |
| 6347601 | Film forming apparatus | Kazuto Hosoi, Toshiyasu Shirasuna, Kazuhiko Takada, Ryuji Okamura, Kazuyoshi Akiyama | 2002-02-19 |
| 6336423 | Apparatus for forming a deposited film by plasma chemical vapor deposition | Ryuji Okamura, Toshiyasu Shirasuna, Kazuhiko Takada, Kazuyoshi Akiyama | 2002-01-08 |
| 6321759 | Method for cleaning a substrate | Ryuji Okamura, Toshiyasu Shirasuna, Kazuhiko Takada, Kazuyoshi Akiyama, Kazuto Hosoi | 2001-11-27 |
| 6300225 | Plasma processing method | Ryuji Okamura, Tatsuyuki Aoike, Toshiyasu Shirasuna, Kazuhiko Takada, Kazuyoshi Akiyama | 2001-10-09 |
| 6250251 | Vacuum processing apparatus and vacuum processing method | Kazuyoshi Akiyama, Tatsuyuki Aoike, Toshiyasu Shirasuna, Takashi Otsuka, Daisuke Tazawa +1 more | 2001-06-26 |
| 6165274 | Plasma processing apparatus and method | Kazuyoshi Akiyama, Tatsuyuki Aoike, Toshiyasu Shirasuna, Kazuhiko Takada, Ryuji Okamura | 2000-12-26 |
| 6155201 | Plasma processing apparatus and plasma processing method | Toshiyasu Shirasuna, Ryuji Okamura, Kazuyoshi Akiyama, Takashi Ohtsuka, Kazuto Hosoi | 2000-12-05 |
| 6148763 | Deposited film forming apparatus | Kazuyoshi Akiyama, Toshiyasu Shirasuna, Kazuhiko Takada, Ryuji Okamura | 2000-11-21 |
| 5817181 | Process for forming deposited film for light-receiving member, light-received member produced by the process deposited film forming apparatus, and method for cleaning deposited film forming apparatus | Ryuji Okamura, Kazuyoshi Akiyama, Koji Hitsuishi, Satoshi Kojima, Hirokazu Ohtoshi +1 more | 1998-10-06 |
| 5766811 | Method of manufacturing amorphous silicon electrophotographic photosensitive member | Satoshi Kojima | 1998-06-16 |
| 5631727 | Image forming apparatus having discharging means using light source actuated prior to latent image formation | Toshiyuki Ehara, Koji Yamazaki, Shigenori Ueda | 1997-05-20 |