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Home › Process for forming deposited film for light-receiving member, light-received member produced by the process deposited film forming apparatus, and method for cleaning deposited film forming apparatus

Process for forming deposited film for light-receiving member, light-received member produced by the process deposited film forming apparatus, and method for cleaning deposited film forming apparatus

US Patent 5817181 · Granted Oct 6, 1998

Estimated economic value: $38,000 ⓘ

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