Issued Patents All Time
Showing 51–75 of 122 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10931143 | Rechargeable wafer carrier systems | Abner Bello, Stephanie Waite | 2021-02-23 |
| 10919701 | Interchangeable automated mobile robots with a plurality of operating modes configuring a plurality of different robot task capabilities | John G. Lert, Jr., Matthew W. Coady | 2021-02-16 |
| 10854478 | Load lock fast pump vent | Christopher Hofmeister, Martin R. Elliott, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus +3 more | 2020-12-01 |
| 10815057 | Universal gripper for tote and sub-tote transport | Martin R. Elliott, John G. Lert, Jr. | 2020-10-27 |
| 10818528 | Self-contained metrology wafer carrier systems | Abner Bello, Stephanie Waite, Thomas Beeg | 2020-10-27 |
| 10707108 | Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication | Stephanie Waite, Stephen B. Miner, John Robinson | 2020-07-07 |
| 10679882 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, Ulysses Gilchrist, Christopher Hofmeister, Daniel Babbs, Robert C. May | 2020-06-09 |
| 10593575 | System and method for monitoring wafer handling and a wafer handling machine | Stephen B. Miner, Ryan John Gallagher | 2020-03-17 |
| 10541157 | Load lock fast pump vent | Christopher Hofmeister, Martin R. Elliott, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus +3 more | 2020-01-21 |
| 10435241 | Storage and retrieval system | John G. Lert, Jr. | 2019-10-08 |
| 10242895 | Self-contained metrology wafer carrier systems | Abner Bello, Stephanie Waite, Thomas Beeg | 2019-03-26 |
| 10109516 | Overhead substrate handling and storage system | Eric Christensen, Leslie Marshall, Ryan John Gallagher, Stephanie Waite, Gabriel Gaxiola | 2018-10-23 |
| 9978623 | Side opening unified pod | Daniel Babbs, Robert C. May, William C. Weaver | 2018-05-22 |
| 9911634 | Self-contained metrology wafer carrier systems | Abner Bello, Stephanie Waite, Thomas Beeg | 2018-03-06 |
| 9881825 | Reduced capacity carrier and method of use | Ulysses Gilchrist, Michael L. Bufano, Christopher Hofmeister, Gerarld M. Friedman | 2018-01-30 |
| 9870936 | Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication | Stephanie Waite, Stephen B. Miner, John Robinson | 2018-01-16 |
| 9748088 | Method, storage medium and system for controlling the processing of lots of workpieces | Gero Grau, Steffen Kalisch, Joerg Weigang, Chinmay Oza, Detlef Pabst | 2017-08-29 |
| 9632499 | Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuits | Chinmay Oza, Gero Grau, Detlef Pabst | 2017-04-25 |
| 9564350 | Method and apparatus for storing and transporting semiconductor wafers in a vacuum pod | Stephanie Waite | 2017-02-07 |
| 9478446 | Load lock chamber | Christopher Hofmeister, Martin R. Elliot, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus +3 more | 2016-10-25 |
| 9442482 | System and method for monitoring wafer handling and a wafer handling machine | Stephen B. Miner, Ryan John Gallagher | 2016-09-13 |
| 9437469 | Inertial wafer centering end effector and transport apparatus | Anthony DiBella, Dennis Poole | 2016-09-06 |
| 9411332 | Automated mechanical handling systems for integrated circuit fabrication, system computers programmed for use therein, and methods of handling a wafer carrier having an inlet port and an outlet port | Isaac Sarek Banner, Stephen B. Miner | 2016-08-09 |
| 9385019 | Overhead substrate handling and storage system | Eric Christensen, Leslie Marshall, Ryan John Gallagher, Stephanie Waite, Gabriel Gaxiola | 2016-07-05 |
| 9368382 | Elevator-based tool loading and buffering system | Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist | 2016-06-14 |