Issued Patents All Time
Showing 76–100 of 122 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257320 | Wafer carrier purge apparatuses, automated mechanical handling systems including the same, and methods of handling a wafer carrier during integrated circuit fabrication | Stephanie Waite, Stephen B. Miner, John Robinson | 2016-02-09 |
| 9250623 | Methods and systems for fabricating integrated circuits utilizing universal and local processing management | Chinmay Oza | 2016-02-02 |
| 9224628 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, Ulysses Gilchrist, Christopher Hofmeister, Daniel Babbs, Robert C. May | 2015-12-29 |
| 9142437 | System for separately handling different size FOUPs | Ryan John Gallagher, Stephen B. Miner | 2015-09-22 |
| 9105673 | Side opening unified pod | Daniel Babbs, Robert C. May, William C. Weaver | 2015-08-11 |
| 8888433 | Reduced capacity carrier and method of use | Ulysses Gilchrist, Christopher Hofmeister, Gerald M. Friedman, Michael L. Bufano | 2014-11-18 |
| 8678734 | Elevator-based tool loading and buffering system | Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist | 2014-03-25 |
| 8662812 | Load lock fast pump vent | Christopher Hofmeister, Martin R. Elliot, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus +3 more | 2014-03-04 |
| 8425172 | Reticle manipulation device | Jakob Blattner, Rudy Federici, Clint Harris | 2013-04-23 |
| 8328495 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, Ulysses Gilchrist, Christopher Hofmeister, Daniel Babbs, Robert C. May | 2012-12-11 |
| 8297319 | Carrier gas system and coupling substrate carrier to a loadport | Daniel Babbs | 2012-10-30 |
| 8272825 | Load lock fast pump vent | Christopher Hofmeister, Martin R. Elliot, Alexander Krupyshev, Joseph Hallisey, Joseph A. Kraus +3 more | 2012-09-25 |
| 8272827 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, Ulysses Gilchrist, Christopher Hofmeister, Daniel Babbs, Robert C. May | 2012-09-25 |
| 8267634 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, Ulysses Gilchrist, Christopher Hofmeister, Daniel Babbs, Robert C. May | 2012-09-18 |
| 8182192 | Equipment storage for substrate processing apparatus | Daniel A. Hall, Christopher Hofmeister, Jeff G. Araujo, Steven Allen, Glenn Sindledecker | 2012-05-22 |
| 7925378 | Process apparatus with on-the-fly workpiece centering | Ulysses Gilchrist, Haniel Olivera, Richard J. Pickreign, Robert T. Caveney | 2011-04-12 |
| 7806643 | Elevator-based tool loading and buffering system | Gerald M. Friedman, Michael L. Bufano, Christopher Hofmeister, Ulysses Gilchrist | 2010-10-05 |
| 7798758 | Reduced capacity carrier, transport, load port, buffer system | Michael L. Bufano, Ulysses Gilchrist, Christopher Hofmeister, Daniel Babbs, Robert C. May | 2010-09-21 |
| 7762755 | Equipment storage for substrate processing apparatus | Daniel A. Hall, Christopher Hofmeister, Jeff G. Araujo, Steven Allen, Glenn Sindledecker | 2010-07-27 |
| 7699573 | Reticle manipulating device | Jakob Blattner, Rudy Federici, Clint Haris | 2010-04-20 |
| 7607879 | Substrate processing apparatus with removable component module | Daniel A. Hall, Christopher Hofmeister, Robert T. Caveney, Ulysses Gilchrist, Jeff G. Araujo | 2009-10-27 |
| 7101138 | Extractor/buffer | Michael L. Bufano, Gerald M. Friedman, Robert M. Sullivan | 2006-09-05 |
| RE39241 | Modular SMIF pod breather, adsorbent, and purge cartridges | — | 2006-08-22 |
| 6848876 | Workpiece sorter operating with modular bare workpiece stockers and/or closed container stockers | Daniel Babbs, Tim J. Cosentino, Mark Sammut, Pascal Pinna, Russell E. Zemen, Jr. | 2005-02-01 |
| 6729462 | Edge grip aligner with buffering capabilities | Daniel Babbs, Jae Hong Kim, Matt W. Coady | 2004-05-04 |