Issued Patents All Time
Showing 101–122 of 122 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6704998 | Port door removal and wafer handling robotic system | Anthony C. Bonora, Raymond S. Martin | 2004-03-16 |
| 6677690 | System for safeguarding integrated intrabay pod delivery and storage system | Daniel Babbs, Richard H. Gould, Michael Krolak, David T. Feindel, Timothy Luong | 2004-01-13 |
| 6612797 | Cassette buffering within a minienvironment | Anthony C. Bonora, Joshua W. Shenk | 2003-09-02 |
| 6591960 | Edge grip aligner with buffering capabilities | Daniel Babbs, Jae Hong Kim, Matt W. Coady | 2003-07-15 |
| 6579052 | SMIF pod storage, delivery and retrieval system | Anthony C. Bonora, Raymond S. Martin, Robert Netsch, Joshua T. Oen, Terry Mosier | 2003-06-17 |
| 6520727 | Modular sorter | Daniel Babbs, Timothy Ewald, Matthew W. Coady | 2003-02-18 |
| 6398032 | SMIF pod including independently supported wafer cassette | Anthony C. Bonora, Raymond S. Martin, Perry Peterson | 2002-06-04 |
| 6364595 | Reticle transfer system | Anthony C. Bonora, Joshua W. Shenk | 2002-04-02 |
| 6318953 | SMIF-compatible open cassette enclosure | Anthony C. Bonora, Robert Netsch, Patrick Sullivan, Joshua W. Shenk, Edwin Noma | 2001-11-20 |
| 6319297 | Modular SMIF pod breather, adsorbent, and purge cartridges | — | 2001-11-20 |
| 6298280 | Method for in-cassette wafer center determination | Anthony C. Bonora, Krishna D. Swamy, Mark Davis, Mike Cookson | 2001-10-02 |
| 6261044 | Pod to port door retention and evacuation system | Joshua W. Shenk | 2001-07-17 |
| 6220808 | Ergonomic, variable size, bottom opening system compatible with a vertical interface | Anthony C. Bonora, Raymond S. Martin | 2001-04-24 |
| 6216873 | SMIF container including a reticle support structure | Raymond S. Martin, Joshua W. Shenk, Robert P. Wartenbergh | 2001-04-17 |
| 6188323 | Wafer mapping system | Frederick T. Rosenquist, Bruce Richardson, Anthony C. Bonora | 2001-02-13 |
| 6164664 | Kinematic coupling compatible passive interface seal | Joshua W. Shenk, Perry Peterson | 2000-12-26 |
| 6056026 | Passively activated valve for carrier purging | Joshua W. Shenk | 2000-05-02 |
| 5988233 | Evacuation-driven SMIF pod purge system | Anthony C. Bonora, Raymond S. Martin, Jay Tatro | 1999-11-23 |
| 5980183 | Integrated intrabay buffer, delivery, and stocker system | — | 1999-11-09 |
| 5944475 | Rotated, orthogonal load compatible front-opening interface | Anthony C. Bonora, Raymond S. Martin | 1999-08-31 |
| 5895191 | Sealable, transportable container adapted for horizontal loading and unloading | Anthony C. Bonora | 1999-04-20 |
| 5653565 | SMIF port interface adaptor | Anthony C. Bonora, Raymond S. Martin, Bruce C. Rhine | 1997-08-05 |