Issued Patents All Time
Showing 25 most recent of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8872311 | Semiconductor device and a method of manufacture therefor | Nace Rossi | 2014-10-28 |
| 7811944 | Semiconductor device and a method of manufacture therefor | Nace Rossi | 2010-10-12 |
| 7163438 | Zone polishing using variable slurry solid content | Jovin Lim, Nace Layadi, Sebastian Ouek | 2007-01-16 |
| 7005724 | Semiconductor device and a method of manufacture therefor | Nace Rossi | 2006-02-28 |
| 6984166 | Zone polishing using variable slurry solid content | Jovin Lim, Nace Layadi, Sebastian Ser Wee Quek | 2006-01-10 |
| 6910907 | Contact for use in an integrated circuit and a method of manufacture therefor | Nace Layadi | 2005-06-28 |
| 6821886 | IMP TiN barrier metal process | Nace Layadi, Jovin Lim | 2004-11-23 |
| 6624039 | Alignment mark having a protective oxide layer for use with shallow trench isolation | Mahjoub Ali Abdelgadir, Stephen C. Kuehne, Scott F. Shive | 2003-09-23 |
| 6548906 | Method for reducing a metal seam in an interconnect structure and a device manufactured thereby | Nace Layadi | 2003-04-15 |
| 6372605 | Additional etching to decrease polishing time for shallow-trench isolation in semiconductor processing | Stephen C. Kuehne, Scott F. Shive | 2002-04-16 |
| 6368972 | Method for making an integrated circuit including alignment marks | Scott F. Shive | 2002-04-09 |
| 6354910 | Apparatus and method for in-situ measurement of polishing pad thickness loss | Richardson O. Adebanjo, William Easter, Frank Miceli, Jose Omar Rodriguez | 2002-03-12 |
| 6309900 | Test structures for testing planarization systems and methods for using same | Frank Miceli, Subramanian Karthikeyan | 2001-10-30 |
| 6287173 | Longer lifetime warm-up wafers for polishing systems | Annette M. Crevasse, William Easter, John A. Maze, Frank Miceli | 2001-09-11 |
| 6281128 | Wafer carrier modification for reduced extraction force | John A. Maze, Frank Miceli, Jose Omar Rodriguez, Robert M. Symons | 2001-08-28 |
| 6274933 | Integrated circuit device having a planar interlevel dielectric layer | Mahjoub Ali Abdelgadir | 2001-08-14 |
| 6261958 | Method for performing chemical-mechanical polishing | Annette M. Crevasse, Sanjay Patel, John Thomas Sowell | 2001-07-17 |
| 6217419 | Chemical-mechanical polisher | Jose Omar Rodriguez | 2001-04-17 |
| 6146975 | Shallow trench isolation | Stephen C. Kuehne | 2000-11-14 |
| 6110831 | Method of mechanical polishing | James T. Cargo, Ronald J. Holmes, Ruichen Liu | 2000-08-29 |
| 6110012 | Chemical-mechanical polishing apparatus and method | Arun K. Nanda, Jose Omar Rodriguez | 2000-08-29 |
| 6051500 | Device and method for polishing a semiconductor substrate | Arun K. Nanda, Omar Rodriguez | 2000-04-18 |
| 6033293 | Apparatus for performing chemical-mechanical polishing | Annette M. Crevasse, Sanjay Patel, John Thomas Sowell | 2000-03-07 |
| 6008123 | Method for using a hardmask to form an opening in a semiconductor substrate | Taeho Kook, Kurt G. Steiner, Tungsheng Yang | 1999-12-28 |
| 4814291 | Method of making devices having thin dielectric layers | Sea C. Kim, William H. Stinebaugh, Jr. | 1989-03-21 |