Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7527544 | System of using offset gage for CMP polishing pad alignment and adjustment | Charles Storey, Andres Garcia, Margareth Seputro, Frank Miceli | 2009-05-05 |
| 7338569 | Method and system of using offset gage for CMP polishing pad alignment and adjustment | Charles Storey, Andres Garcia, Margareth Seputro, Frank Miceli | 2008-03-04 |
| 7172496 | Method and apparatus for cleaning slurry depositions from a water carrier | Charles Storey, Andres Garcia, Margareth Seputro, Frank Miceli | 2007-02-06 |
| 7033257 | Carrier head for chemical mechanical polishing | Andres Garcia, Charles Storey | 2006-04-25 |
| 6951510 | Chemical mechanical polishing pad with grooves alternating between a larger groove size and a smaller groove size | Charles Storey, John F. Thompson | 2005-10-04 |
| 6702654 | Conditioning wheel for conditioning a semiconductor wafer polishing pad and method of manufacture thereof | Arun K. Nanda, Laurence D. Schultz, Charles Storey | 2004-03-09 |
| 6373945 | Terminal block extension for greater wire packing efficiency | William Easter, Dale Evans, John A. Maze, Frank Miceli | 2002-04-16 |
| 6354910 | Apparatus and method for in-situ measurement of polishing pad thickness loss | Richardson O. Adebanjo, William Easter, Alvaro Maury, Frank Miceli | 2002-03-12 |
| 6281128 | Wafer carrier modification for reduced extraction force | Alvaro Maury, John A. Maze, Frank Miceli, Robert M. Symons | 2001-08-28 |
| 6217419 | Chemical-mechanical polisher | Alvaro Maury | 2001-04-17 |
| 6140211 | Method for recycling wafers used for quality assurance testing of integrated circuit fabrication equipment | Arun K. Nanda | 2000-10-31 |
| 6123602 | Portable slurry distribution system | Kurt Stetzler | 2000-09-26 |
| 6110012 | Chemical-mechanical polishing apparatus and method | Alvaro Maury, Arun K. Nanda | 2000-08-29 |
| 6093086 | Polishing head release mechanism | William Easter, John A. Maze, Frank Miceli | 2000-07-25 |
| 6059638 | Magnetic force carrier and ring for a polishing apparatus | Annette M. Crevasse, William Easter, John A. Maze, Frank Micelli | 2000-05-09 |
| 5975836 | Apparatus for visually reading semiconductor wafer identification indicia | — | 1999-11-02 |