Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7695589 | Versatile system for conditioning slurry in CMP process | David Anthony Stark, Neal Murphy | 2010-04-13 |
| 6896583 | Method and apparatus for conditioning a polishing pad | Jose Omar Rodriquez, Charles Storey | 2005-05-24 |
| 6702654 | Conditioning wheel for conditioning a semiconductor wafer polishing pad and method of manufacture thereof | Arun K. Nanda, Jose Omar Rodriguez, Charles Storey | 2004-03-09 |
| 6083838 | Method of planarizing a surface on a semiconductor wafer | Randolph H. Burton, Yaw S. Obeng | 2000-07-04 |
| 6056630 | Polishing apparatus with carrier head pivoting device | Arun K. Nanda | 2000-05-02 |
| 6048256 | Apparatus and method for continuous delivery and conditioning of a polishing slurry | Yaw S. Obeng | 2000-04-11 |
| 5980363 | Under-pad for chemical-mechanical planarization of semiconductor wafers | Scott Meikle | 1999-11-09 |
| 5871392 | Under-pad for chemical-mechanical planarization of semiconductor wafers | Scott Meikle | 1999-02-16 |
| 5514245 | Method for chemical planarization (CMP) of a semiconductor wafer to provide a planar surface free of microscratches | Trung T. Doan, Malcolm Grief | 1996-05-07 |
| 5421769 | Apparatus for planarizing semiconductor wafers, and a polishing pad for a planarization apparatus | Mark E. Tuttle, Trung T. Doan | 1995-06-06 |
| RE34425 | Method and apparatus for mechanical planarization and endpoint detection of a semiconductor wafer | — | 1993-11-02 |
| 5234867 | Method for planarizing semiconductor wafers with a non-circular polishing pad | Mark E. Tuttle, Trung T. Doan | 1993-08-10 |
| 5081796 | Method and apparatus for mechanical planarization and endpoint detection of a semiconductor wafer | — | 1992-01-21 |
| 5069002 | Apparatus for endpoint detection during mechanical planarization of semiconductor wafers | Gurtej S. Sandhu, Trung T. Doan | 1991-12-03 |
| 5036015 | Method of endpoint detection during chemical/mechanical planarization of semiconductor wafers | Gurtej S. Sandhu, Trung T. Doan | 1991-07-30 |
| 5011580 | Method of reworking an electrical multilayer interconnect | Ju-Don T. Pan, John Curry | 1991-04-30 |