| 7527544 |
System of using offset gage for CMP polishing pad alignment and adjustment |
Jose Omar Rodriguez, Andres Garcia, Margareth Seputro, Frank Miceli |
2009-05-05 |
| 7338569 |
Method and system of using offset gage for CMP polishing pad alignment and adjustment |
Jose Omar Rodriguez, Andres Garcia, Margareth Seputro, Frank Miceli |
2008-03-04 |
| 7172496 |
Method and apparatus for cleaning slurry depositions from a water carrier |
Jose Omar Rodriguez, Andres Garcia, Margareth Seputro, Frank Miceli |
2007-02-06 |
| 7033257 |
Carrier head for chemical mechanical polishing |
Andres Garcia, Jose Omar Rodriguez |
2006-04-25 |
| 6951510 |
Chemical mechanical polishing pad with grooves alternating between a larger groove size and a smaller groove size |
Jose Omar Rodriguez, John F. Thompson |
2005-10-04 |
| 6896583 |
Method and apparatus for conditioning a polishing pad |
Jose Omar Rodriquez, Laurence D. Schultz |
2005-05-24 |
| 6702654 |
Conditioning wheel for conditioning a semiconductor wafer polishing pad and method of manufacture thereof |
Arun K. Nanda, Jose Omar Rodriguez, Laurence D. Schultz |
2004-03-09 |