Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7527544 | System of using offset gage for CMP polishing pad alignment and adjustment | Jose Omar Rodriguez, Charles Storey, Margareth Seputro, Frank Miceli | 2009-05-05 |
| 7338569 | Method and system of using offset gage for CMP polishing pad alignment and adjustment | Jose Omar Rodriguez, Charles Storey, Margareth Seputro, Frank Miceli | 2008-03-04 |
| 7172496 | Method and apparatus for cleaning slurry depositions from a water carrier | Jose Omar Rodriguez, Charles Storey, Margareth Seputro, Frank Miceli | 2007-02-06 |
| 7033257 | Carrier head for chemical mechanical polishing | Jose Omar Rodriguez, Charles Storey | 2006-04-25 |