| 6750145 |
Method of eliminating agglomerate particles in a polishing slurry |
Annette M. Crevasse, William Easter, Sailesh Mansinh Merchant, Frank Miceli |
2004-06-15 |
|
| 6728364 |
Analog phone bank connector |
William Easter, Dale Evans, Frank Miceli |
2004-04-27 |
|
| 6726537 |
Polishing carrier head |
Annette M. Crevasse, William Easter, Frank Miceli |
2004-04-27 |
|
| 6615433 |
Apparatus for detecting wetness of a semiconductor wafer cleaning brush |
Annette M. Crevasse, William Easter, Frank Miceli |
2003-09-09 |
|
| 6579797 |
Cleaning brush conditioning apparatus |
Annette M. Crevasse, William Easter, Frank Miceli |
2003-06-17 |
|
| 6558238 |
Apparatus and method for reclamation of used polishing slurry |
Annette M. Crevasse, William Easter, Frank Miceli |
2003-05-06 |
|
| 6551410 |
Method of cleaning a semiconductor wafer with a cleaning brush assembly having a contractible and expandable arbor |
Annette M. Crevasse, William Easter, Frank Miceli |
2003-04-22 |
|
| 6537135 |
Curvilinear chemical mechanical planarization device and method |
William Easter, Sailesh Mansinh Merchant, Frank Miceli, Charles Walter Pearce |
2003-03-25 |
|
| 6517416 |
Chemical mechanical polisher including a pad conditioner and a method of manufacturing an integrated circuit using the chemical mechanical polisher |
Annette M. Crevasse, William Easter, Frank Miceli |
2003-02-11 |
|
| 6518987 |
Mouse and mouse template for a motion impaired user |
Annette M. Crevasse, William Easter, Frank Miceli |
2003-02-11 |
|
| 6514123 |
Semiconductor polishing pad alignment device for a polishing apparatus and method of use |
Annette M. Crevasse, William Easter, Frank Miceli |
2003-02-04 |
|
| 6508363 |
Slurry container |
Annette M. Crevasse, William Easter, Frank Miceli |
2003-01-21 |
$16,592,000 |
| 6423149 |
Apparatus and method for gradient cleaning of semiconductor wafers |
Annette M. Crevasse, William Easter, Frank Miceli |
2002-07-23 |
|
| 6402599 |
Slurry recirculation system for reduced slurry drying |
Annette M. Crevasse, William Easter, Frank Miceli, Craig R. Zavilla |
2002-06-11 |
|
| 6373945 |
Terminal block extension for greater wire packing efficiency |
William Easter, Dale Evans, Frank Miceli, Jose Omar Rodriguez |
2002-04-16 |
$5,689,000 |
| 6368190 |
Electrochemical mechanical planarization apparatus and method |
William Easter, Frank Miceli |
2002-04-09 |
$2,521,000 |
| 6368955 |
Method of polishing semiconductor structures using a two-step chemical mechanical planarization with slurry particles having different particle bulk densities |
William Easter, Frank Miceli |
2002-04-09 |
$14,987,000 |
| 6369799 |
Computer pointer device for handicapped persons |
Frank Miceli, William Easter |
2002-04-09 |
$14,987,000 |
| 6354928 |
Polishing apparatus with carrier ring and carrier head employing like polarities |
Annette M. Crevasse, William Easter, Frank Miceli |
2002-03-12 |
$6,265,000 |
| 6355184 |
Method of eliminating agglomerate particles in a polishing slurry |
Annette M. Crevasse, William Easter, Sailesh Mansinh Merchant, Frank Miceli |
2002-03-12 |
$6,265,000 |
| 6299519 |
Apparatus and method for removing a polishing pad from a platen |
William Easter, Frank Micelli |
2001-10-09 |
$10,077,000 |
| 6293847 |
Apparatus for chemical mechanical polishing endpoint detection using a hydrogen sensor |
William Easter, Frank Miceli, Sudhanshu Misra, Allen Yen |
2001-09-25 |
$5,207,000 |
| 6290883 |
Method for making porous CMP article |
Annette M. Crevasse, William Easter, Frank Miceli |
2001-09-18 |
$26,046,000 |
| 6288648 |
Apparatus and method for determining a need to change a polishing pad conditioning wheel |
William Easter, Frank Miceli, Yifeng Winston Yan |
2001-09-11 |
|
| 6287173 |
Longer lifetime warm-up wafers for polishing systems |
Annette M. Crevasse, William Easter, Alvaro Maury, Frank Miceli |
2001-09-11 |
|