Issued Patents All Time
Showing 25 most recent of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6750145 | Method of eliminating agglomerate particles in a polishing slurry | Annette M. Crevasse, William Easter, Sailesh Mansinh Merchant, Frank Miceli | 2004-06-15 |
| 6726537 | Polishing carrier head | Annette M. Crevasse, William Easter, Frank Miceli | 2004-04-27 |
| 6728364 | Analog phone bank connector | William Easter, Dale Evans, Frank Miceli | 2004-04-27 |
| 6615433 | Apparatus for detecting wetness of a semiconductor wafer cleaning brush | Annette M. Crevasse, William Easter, Frank Miceli | 2003-09-09 |
| 6579797 | Cleaning brush conditioning apparatus | Annette M. Crevasse, William Easter, Frank Miceli | 2003-06-17 |
| 6558238 | Apparatus and method for reclamation of used polishing slurry | Annette M. Crevasse, William Easter, Frank Miceli | 2003-05-06 |
| 6551410 | Method of cleaning a semiconductor wafer with a cleaning brush assembly having a contractible and expandable arbor | Annette M. Crevasse, William Easter, Frank Miceli | 2003-04-22 |
| 6537135 | Curvilinear chemical mechanical planarization device and method | William Easter, Sailesh Mansinh Merchant, Frank Miceli, Charles Walter Pearce | 2003-03-25 |
| 6518987 | Mouse and mouse template for a motion impaired user | Annette M. Crevasse, William Easter, Frank Miceli | 2003-02-11 |
| 6517416 | Chemical mechanical polisher including a pad conditioner and a method of manufacturing an integrated circuit using the chemical mechanical polisher | Annette M. Crevasse, William Easter, Frank Miceli | 2003-02-11 |
| 6514123 | Semiconductor polishing pad alignment device for a polishing apparatus and method of use | Annette M. Crevasse, William Easter, Frank Miceli | 2003-02-04 |
| 6508363 | Slurry container | Annette M. Crevasse, William Easter, Frank Miceli | 2003-01-21 |
| 6423149 | Apparatus and method for gradient cleaning of semiconductor wafers | Annette M. Crevasse, William Easter, Frank Miceli | 2002-07-23 |
| 6402599 | Slurry recirculation system for reduced slurry drying | Annette M. Crevasse, William Easter, Frank Miceli, Craig R. Zavilla | 2002-06-11 |
| 6373945 | Terminal block extension for greater wire packing efficiency | William Easter, Dale Evans, Frank Miceli, Jose Omar Rodriguez | 2002-04-16 |
| 6368190 | Electrochemical mechanical planarization apparatus and method | William Easter, Frank Miceli | 2002-04-09 |
| 6368955 | Method of polishing semiconductor structures using a two-step chemical mechanical planarization with slurry particles having different particle bulk densities | William Easter, Frank Miceli | 2002-04-09 |
| 6369799 | Computer pointer device for handicapped persons | Frank Miceli, William Easter | 2002-04-09 |
| 6354928 | Polishing apparatus with carrier ring and carrier head employing like polarities | Annette M. Crevasse, William Easter, Frank Miceli | 2002-03-12 |
| 6355184 | Method of eliminating agglomerate particles in a polishing slurry | Annette M. Crevasse, William Easter, Sailesh Mansinh Merchant, Frank Miceli | 2002-03-12 |
| 6299519 | Apparatus and method for removing a polishing pad from a platen | William Easter, Frank Micelli | 2001-10-09 |
| 6293847 | Apparatus for chemical mechanical polishing endpoint detection using a hydrogen sensor | William Easter, Frank Miceli, Sudhanshu Misra, Allen Yen | 2001-09-25 |
| 6290883 | Method for making porous CMP article | Annette M. Crevasse, William Easter, Frank Miceli | 2001-09-18 |
| 6288648 | Apparatus and method for determining a need to change a polishing pad conditioning wheel | William Easter, Frank Miceli, Yifeng Winston Yan | 2001-09-11 |
| 6287173 | Longer lifetime warm-up wafers for polishing systems | Annette M. Crevasse, William Easter, Alvaro Maury, Frank Miceli | 2001-09-11 |