Issued Patents All Time
Showing 151–175 of 211 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8893067 | System and method for lithography simulation | Jun Ye, Yen-Wen Lu, Luoqi Chen, Xun Chen | 2014-11-18 |
| 8893058 | Methods and system for model-based generic matching and tuning | Hanying Feng, Jun Ye | 2014-11-18 |
| 8893060 | Optimization of source, mask and projection optics | Hanying Feng, Jun Ye | 2014-11-18 |
| 8874423 | Model-based scanner tuning systems and methods | Wenjin Shao, Ronaldus Johannes Gijsbertus Goossens, Jun Ye, James Patrick Koonmen | 2014-10-28 |
| 8856694 | Computational process control | Jun Ye, James Patrick Koonmen | 2014-10-07 |
| 8838632 | Methods and apparatus for searching with awareness of geography and languages | — | 2014-09-16 |
| 8806387 | Model-based process simulation systems and methods | Wenjin Shao, Ronaldus Johannes Gijsbertus Goossens, Jun Ye, James Patrick Koonmen | 2014-08-12 |
| 8806394 | Pattern-dependent proximity matching/tuning including light manipulation by projection optics | Hanying Feng, Jun Ye | 2014-08-12 |
| 8745551 | Pattern-independent and hybrid matching/tuning including light manipulation by projection optics | Hanying Feng, Jun Ye | 2014-06-03 |
| 8732625 | Methods for performing model-based lithography guided layout design | Jun Ye, Hanying Feng | 2014-05-20 |
| 8700493 | Methods and apparatus for freshness and completeness of information | — | 2014-04-15 |
| 8694928 | Pattern selection for lithographic model calibration | Wenjin Shao, Jun Ye, Ronaldus Johannes Gijsbertus Goossens | 2014-04-08 |
| 8682059 | Harmonic resist model for use in a lithographic apparatus and a device manufacturing method | Luoqi Chen, Antoine Jean Bruguier, Wenjin Shao | 2014-03-25 |
| 8589829 | Three-dimensional mask model for photolithography simulation | Peng Liu, Luoqi Chen, Jun Ye | 2013-11-19 |
| 8584056 | Fast freeform source and mask co-optimization method | Luoqi Chen, Jun Ye | 2013-11-12 |
| 8571845 | Model-based scanner tuning systems and methods | Wenjin Shao, Ronaldus Johannes Gijsbertus Goossens, Jun Ye, James Patrick Koonmen | 2013-10-29 |
| 8570485 | Lens heating compensation systems and methods | Jun Ye, Peng Liu | 2013-10-29 |
| 8560978 | Pattern-dependent proximity matching/tuning including light manipulation by projection optics | Hanying Feng, Jun Ye | 2013-10-15 |
| 8542340 | Illumination optimization | Jun Ye, Hanying Feng | 2013-09-24 |
| 8527255 | Methods and systems for lithography process window simulation | Jun Ye, Hanying Feng | 2013-09-03 |
| 8516405 | System and method for lithography simulation | Jun Ye, Yen-Wen Lu, Luoqi Chen, Xun Chen | 2013-08-20 |
| 8447095 | Harmonic resist model for use in a lithographic apparatus and a device manufacturing method | Luoqi Chen, Antoine Jean Bruguier, Wenjin Shao | 2013-05-21 |
| 8443307 | Methods and system for model-based generic matching and tuning | Hanying Feng, Jun Ye | 2013-05-14 |
| 8418088 | Methods and system for lithography calibration | Jun Ye, Hanying Feng | 2013-04-09 |
| 8412536 | Methods and apparatus for freshness and completeness of information | Leonard Kleinrock | 2013-04-02 |