Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11561480 | System and method for inspecting a wafer | Ivo Liebregts, Niladri Sen, Koen Thuijs | 2023-01-24 |
| 10569469 | Model-based scanner tuning systems and methods | Yu Cao, Wenjin Shao, Jun Ye, James Patrick Koonmen | 2020-02-25 |
| 10137643 | Model-based process simulation systems and methods | Yu Cao, Wenjin Shao, Jun Ye, James Patrick Koonmen | 2018-11-27 |
| 9672301 | Pattern selection for lithographic model calibration | Yu Cao, Wenjin Shao, Jun Ye | 2017-06-06 |
| 8874423 | Model-based scanner tuning systems and methods | Yu Cao, Wenjin Shao, Jun Ye, James Patrick Koonmen | 2014-10-28 |
| 8806387 | Model-based process simulation systems and methods | Yu Cao, Wenjin Shao, Jun Ye, James Patrick Koonmen | 2014-08-12 |
| 8694928 | Pattern selection for lithographic model calibration | Yu Cao, Wenjin Shao, Jun Ye | 2014-04-08 |
| 8571845 | Model-based scanner tuning systems and methods | Yu Cao, Wenjin Shao, Jun Ye, James Patrick Koonmen | 2013-10-29 |