Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10846442 | Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration | Jun Ye, Yu Cao, Hanying Feng | 2020-11-24 |
| 10569469 | Model-based scanner tuning systems and methods | Yu Cao, Ronaldus Johannes Gijsbertus Goossens, Jun Ye, James Patrick Koonmen | 2020-02-25 |
| 10137643 | Model-based process simulation systems and methods | Yu Cao, Ronaldus Johannes Gijsbertus Goossens, Jun Ye, James Patrick Koonmen | 2018-11-27 |
| 10025885 | Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration | Jun Ye, Yu Cao, Hanying Feng | 2018-07-17 |
| 10025198 | Smart selection and/or weighting of parameters for lithographic process simulation | Yu Cao, Hanying Feng, Fei Du, Martin Snajdr | 2018-07-17 |
| 9672301 | Pattern selection for lithographic model calibration | Yu Cao, Jun Ye, Ronaldus Johannes Gijsbertus Goossens | 2017-06-06 |
| 9588439 | Information matrix creation and calibration test pattern selection based on computational lithography model parameters | Antoine Jean Bruguier, Yu Cao, Jun Ye | 2017-03-07 |
| 8942463 | Harmonic resist model for use in a lithographic apparatus and a device manufacturing method | Yu Cao, Luoqi Chen, Antoine Jean Bruguier | 2015-01-27 |
| 8930172 | Methods and systems for parameter-sensitive and orthogonal gauge design for lithography calibration | Jun Ye, Yu Cao, Hanying Feng | 2015-01-06 |
| 8887105 | Calibration pattern selection based on noise sensitivity | Antoine Jean Bruguier, Song Lan | 2014-11-11 |
| 8874423 | Model-based scanner tuning systems and methods | Yu Cao, Ronaldus Johannes Gijsbertus Goossens, Jun Ye, James Patrick Koonmen | 2014-10-28 |
| 8806387 | Model-based process simulation systems and methods | Yu Cao, Ronaldus Johannes Gijsbertus Goossens, Jun Ye, James Patrick Koonmen | 2014-08-12 |
| 8694928 | Pattern selection for lithographic model calibration | Yu Cao, Jun Ye, Ronaldus Johannes Gijsbertus Goossens | 2014-04-08 |
| 8682059 | Harmonic resist model for use in a lithographic apparatus and a device manufacturing method | Yu Cao, Luoqi Chen, Antoine Jean Bruguier | 2014-03-25 |
| 8571845 | Model-based scanner tuning systems and methods | Yu Cao, Ronaldus Johannes Gijsbertus Goossens, Jun Ye, James Patrick Koonmen | 2013-10-29 |
| 8447095 | Harmonic resist model for use in a lithographic apparatus and a device manufacturing method | Yu Cao, Luoqi Chen, Antoine Jean Bruguier | 2013-05-21 |
| 8379991 | Delta TCC for fast sensitivity model computation | Yu Cao, Jun Ye, Hua Cao | 2013-02-19 |