Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9733572 | Method and apparatus for measuring asymmetry of a microstructure, position measuring method, position measuring apparatus, lithographic apparatus and device manufacturing method | — | 2017-08-15 |
| 9632039 | Inspection apparatus, inspection method and manufacturing method | Arie Jeffrey Den Boef, Nitesh Pandey, Stefan Michiel Witte, Kjeld Sijbrand Eduard Eikema | 2017-04-25 |
| 9606442 | Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef | 2017-03-28 |
| 9551939 | Mark position measuring apparatus and method, lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Stanley Drazkiewicz, Justin Kreuzer, Gerrit Johannes Nijmeijer | 2017-01-24 |
| 9547241 | Alignment sensor, lithographic apparatus and alignment method | Arie Jeffrey Den Boef, Patricius Aloysius Jacobus Tinnemans | 2017-01-17 |
| 9506743 | Position measuring apparatus, position measuring method, lithographic apparatus and device manufacturing method | Arie Jeffrey Den Boef, Justin Kreuzer, Gerrit Johannes Nijmeijer, J. Christian Swindal, Patricius Aloysius Jacobus Tinnemans +1 more | 2016-11-29 |
| 9279657 | Level sensor arrangement in a lithographic apparatus for measuring multi-layer surfaces | Arie Jeffrey Den Boef | 2016-03-08 |