Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7315384 | Inspection apparatus and method of inspection | Arie Jeffrey Den Boef | 2008-01-01 |
| 7312860 | Test pattern, inspection method, and device manufacturing method | Arie Jeffrey Den Boef, Hans Van Der Laan, Antonius Johannes Josephus Van Dijsseldonk, Antoine Gaston Marie Kiers | 2007-12-25 |
| 7151594 | Test pattern, inspection method, and device manufacturing method | Arie Jeffrey Den Boef, Hans Van Der Laan, Antonius Johannes Josephus Van Dijsseldonk, Antoine Gaston Marie Kiers | 2006-12-19 |
| 7148959 | Test pattern, inspection method, and device manufacturing method | Arie Jeffrey Den Boef | 2006-12-12 |
| 7112813 | Device inspection method and apparatus using an asymmetric marker | Arie Jeffrey Den Boef, Frank Bornebroek, Hugo Augustinus Joseph Cramer, Richard Johannes Franciscus Van Haren, Antoine Gaston Marie Kiers +7 more | 2006-09-26 |
| 6608920 | Target acquisition technique for CD measurement machine | Bo Su | 2003-08-19 |