| 7982850 |
Immersion lithographic apparatus and device manufacturing method with gas supply |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2011-07-19 |
| 7935213 |
Non-leaching adhesive system and its use in a liquid immersion objective |
Emile Johannes Karel Verstegen, Johan Kloosterboer, Hendrik Roelof Stapert, Jacobus Hermanus Maria Neijzen |
2011-05-03 |
| 7922474 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Henricus Wilhelmus Aloysius Janssen, Aleksey Yurievich Kolesnychenko |
2011-04-12 |
| 7906059 |
Imprint lithography |
Erik Roelof Loopstra, Aleksey Yurievich Kolesnychenko |
2011-03-15 |
| 7898642 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen +5 more |
2011-03-01 |
| 7868998 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2011-01-11 |
| 7708924 |
Imprint lithography |
Aleksey Yurievich Kolesnychenko, Yvonne Wendela Kruijt-Stegeman |
2010-05-04 |
| 7710541 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko |
2010-05-04 |
| 7692771 |
Imprint lithography |
Aleksey Yurievich Kolesnychenko, Yvonne Wendela Kruijt-Stegeman |
2010-04-06 |
| 7686970 |
Imprint lithography |
Aleksey Yurievich Kolesnychenko, Yvonne Wendela Kruijt-Stegeman |
2010-03-30 |
| 7642297 |
Non-leaching adhesive system and its use in a liquid immersion objective |
Emile Johannes Karel Verstegen, Johan Kloosterboer, Hendrik Roelof Stapert, Jacobus Hermanus Maria Neijzen |
2010-01-05 |
| 7618250 |
Imprint lithography |
Aleksey Yurievich Kolesnychenko, Yvonne Wendela Kruijt-Stegeman |
2009-11-17 |
| 7611348 |
Imprint lithography |
Aleksey Yurievich Kolesnychenko |
2009-11-03 |
| 7605979 |
Device for directing radiation to a layer, apparatus with such device and method using such apparatus |
Jacobus Hermanus Maria Neijzen |
2009-10-20 |
| 7593093 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more |
2009-09-22 |
| 7593092 |
Lithographic apparatus and device manufacturing method |
Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more |
2009-09-22 |
| 7523701 |
Imprint lithography method and apparatus |
Erik Roelof Loopstra, Aleksey Yurievich Kolesnychenko |
2009-04-28 |
| 7514699 |
Method and device for irradiating spots on a layer |
Jacobus Hermanus Maria Neijzen |
2009-04-07 |
| 7490547 |
Imprint lithography |
Aleksey Yurievich Kolesnychenko |
2009-02-17 |
| 7418902 |
Imprint lithography including alignment |
Yvonne Wendela Kruijt-Stegeman, Aleksey Yurievich Kolensnychenko, Erik Roelof Loopstra |
2008-09-02 |
| 7411653 |
Lithographic apparatus |
Christiaan Alexander Hoogendam, Bob Streefkerk, Johannes Catharinus Hubertus Mulkens, Erik Theodorus Maria Bijlaart, Aleksey Yurievich Kolesnychenko +4 more |
2008-08-12 |
| 7399978 |
Method and device for irradiating spots on a layer |
Jacobus Hermanus Maria Neijzen |
2008-07-15 |
| 7394521 |
Lithographic apparatus and device manufacturing method |
Aleksey Yurievich Kolesnychenko |
2008-07-01 |
| 7388648 |
Lithographic projection apparatus |
Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more |
2008-06-17 |
| 7377764 |
Imprint lithography |
Yvonne Wendela Kruijt-Stegeman, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Johan Frederik Dijksman, Sander Frederik Wuister |
2008-05-27 |
