Issued Patents All Time
Showing 26–50 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7995185 | Systems and methods for thermally-induced aberration correction in immersion lithography | Louis John Markoya, Diane McCafferty | 2011-08-09 |
| 7897058 | Device manufacturing method and computer program product | Richard Johannes Franciscus Van Haren, Maurits Van Der Schaar, Ewoud Vreugdenhil | 2011-03-01 |
| 7898643 | Immersion photolithography system and method using inverted wafer-projection optics interface | — | 2011-03-01 |
| 7882780 | System and method for patterning both sides of a substrate utilizing imprint lithography | — | 2011-02-08 |
| 7773195 | System and method to increase surface tension and contact angle in immersion lithography | — | 2010-08-10 |
| 7751030 | Interferometric lithographic projection apparatus | Louis John Markoya, Aleksandr Khmelichek, Diane McCafferty, Justin Kreuzer | 2010-07-06 |
| 7736825 | Lithographic apparatus and device manufacturing method utilizing a resettable or reversible contrast enhancing layer in a multiple exposure system | — | 2010-06-15 |
| 7701668 | System and method for forming nanodisks used in imprint lithography and nanodisk and memory disk formed thereby | — | 2010-04-20 |
| 7684014 | Lithographic apparatus and device manufacturing method | Diane McCafferty, Louis John Markoya | 2010-03-23 |
| 7561252 | Interferometric lithography system and method used to generate equal path lengths of interfering beams | Johannes Jacobus Matheus Baselmans | 2009-07-14 |
| 7548301 | Maskless optical writer | — | 2009-06-16 |
| 7492442 | Adjustable resolution interferometric lithography system | Louis John Markoya, Aleksandr Khmelichek | 2009-02-17 |
| 7474385 | Adjustable resolution interferometric lithography system | Louis John Markoya, Aleksandr Khmelichek | 2009-01-06 |
| 7445883 | Lithographic printing with polarized light | Nabila Baba-Ali, Justin Kreuzer | 2008-11-04 |
| 7409759 | Method for making a computer hard drive platen using a nano-plate | — | 2008-08-12 |
| 7410591 | Method and system for making a nano-plate for imprint lithography | — | 2008-08-12 |
| 7399422 | System and method for forming nanodisks used in imprint lithography and nanodisk and memory disk formed thereby | — | 2008-07-15 |
| 7363854 | System and method for patterning both sides of a substrate utilizing imprint lithography | — | 2008-04-29 |
| 7304719 | Patterned grid element polarizer | Michael Albert | 2007-12-04 |
| 7256864 | Liquid immersion lithography system having a tilted showerhead relative to a substrate | Nicolaas Ten Kate, Erik Roelof Loopstra, Aleksandr Khmelichek, Louis John Markoya | 2007-08-14 |
| 7253879 | Liquid immersion lithography system with tilted liquid flow | Aleksandr Khmelichek, Louis John Markoya | 2007-08-07 |
| 7199862 | Beam-splitter optics design that maintains an unflipped (unmirrored) image for a catadioptric lithographic system | — | 2007-04-03 |
| 7154669 | Method and system for correction of intrinsic birefringence in UV microlithography | — | 2006-12-26 |
| 7098995 | Apparatus and system for improving phase shift mask imaging performance and associated methods | — | 2006-08-29 |
| 7090964 | Lithographic printing with polarized light | Nabila Baba-Ali, Justin Kreuzer | 2006-08-15 |