Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6200651 | Method of chemical vapor deposition in a vacuum plasma processor responsive to a pulsed microwave source | Gregory A. Roche | 2001-03-13 |
| 5911833 | Method of in-situ cleaning of a chuck within a plasma chamber | Dean R. Denison, Anwar Husain, C. Robert Koemtzopoulos, Felix Kozakevich, David Trussell | 1999-06-15 |
| 5846373 | Method for monitoring process endpoints in a plasma chamber and a process monitoring arrangement in a plasma chamber | David R. Pirkle, Randall S. Mundt | 1998-12-08 |
| 5647953 | Plasma cleaning method for removing residues in a plasma process chamber | Larry Williams, David R. Pirkle, Timothy M. Ebel | 1997-07-15 |
| 4208241 | Device fabrication by plasma etching | Hyman J. Levinstein, Cyril J. Mogab, Roy A. Porter | 1980-06-17 |
| 4181564 | Fabrication of patterned silicon nitride insulating layers having gently sloping sidewalls | Thomas N. Fogarty, Roy A. Porter | 1980-01-01 |