Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979579 | Methods and apparatus for inspecting contact openings in a plasma processing system | Jisoo Kim, Sangheon Lee, Binet Worsham, Bi-Ming Yen, Reza Sadjadi +1 more | 2005-12-27 |
| 6969685 | Etching a dielectric layer in an integrated circuit structure having a metal hard mask layer | Siyi Li, S. M. Reza Sadjadi | 2005-11-29 |
| 6930048 | Etching a metal hard mask for an integrated circuit structure | Siyi Li, S.M. Sadjadi, Tri C. Le, Bi-Ming Yen, Scott Briggs | 2005-08-16 |
| 6919278 | Method for etching silicon carbide | Si Yi Li, S. M. Reza Sadjadi | 2005-07-19 |
| 6909195 | Trench etch process for low-k dielectrics | Siyi Li, S. M. Reza Sadjadi, David R. Pirkle, Steve Lassig, Vinay Pohray +1 more | 2005-06-21 |
| 6794293 | Trench etch process for low-k dielectrics | Siyi Li, S. M. Reza Sadjadi, David R. Pirkle, Steve Lassig, Vinay Pohray +1 more | 2004-09-21 |