Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9711359 | Shadow trim line edge roughness reduction | Tom A. Kamp | 2017-07-18 |
| 8722543 | Composite hard mask with upper sacrificial dielectric layer for the patterning and etching of nanometer size MRAM devices | Rongfu Xiao, Tom Zhong, Witold Kula, Chyu-Jiuh Torng | 2014-05-13 |
| 8236133 | Plasma reactor with center-fed multiple zone gas distribution for improved uniformity of critical dimension bias | Dan Katz, David Palagashvili, Brian K. Hatcher, Theodoros Panagopoulos, Valentin N. Todorow +2 more | 2012-08-07 |
| 8066895 | Method to control uniformity using tri-zone showerhead | Edward P. Hammond, IV, Brian K. Hatcher, Dan Katz, Alexander Paterson, Valentin N. Todorow | 2011-11-29 |
| 8017526 | Gate profile control through effective frequency of dual HF/VHF sources in a plasma etch process | Edward P. Hammond, IV, Alexander Paterson, Brian K. Hatcher, Valentin N. Todorow, Dan Katz | 2011-09-13 |
| 7863060 | Method of double patterning and etching magnetic tunnel junction structures for spin-transfer torque MRAM devices | Tom Zhong, Witold Kula, Chyu-Jiuh Torng | 2011-01-04 |