Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8012000 | Extended pad life for ECMP and barrier removal | Yuchun Wang, Wei-Yung Hsu, Liang-Yuh Chen | 2011-09-06 |
| 7344432 | Conductive pad with ion exchange membrane for electrochemical mechanical polishing | Liang-Yun Chen, Yuchun Wang, Yan Wang, Alain Duboust, Daniel Carl +9 more | 2008-03-18 |
| 6143080 | Wafer processing reactor having a gas flow control system and method | Lawrence D. Bartholomew, Robert J. Bailey, John Boland | 2000-11-07 |