Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6888104 | Thermally matched support ring for substrate processing chamber | Joseph M. Ranish, Aaron Muir Hunter, Balasubramanian Ramachandran, Sundar Ramamurthy, Vedapuram S. Achutharaman +1 more | 2005-05-03 |
| 6620670 | Process conditions and precursors for atomic layer deposition (ALD) of AL2O3 | Kevin Song, Shih-Hung Li, Liang-Yuh Chen | 2003-09-16 |
| 6569749 | Silicon and oxygen ion co-implanation for metallic gettering in epitaxial wafers | Witawat Wijaranakula, Naoto Tate | 2003-05-27 |
| 6374150 | Method and apparatus for monitoring and/or end point detecting a process | Gregory Redinbo, Michael Rivkin | 2002-04-16 |
| 6022793 | Silicon and oxygen ion co-implantation for metallic gettering in epitaxial wafers | Witawat Wijaranakula, Naoto Tate | 2000-02-08 |