Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10141153 | Magnetron having enhanced cooling characteristics | Simon Yavelberg, Ramprakash Sankarakrishnan | 2018-11-27 |
| 10049908 | Methods and apparatus for electrostatic chuck repair and refurbishment | Robert T. Hirahara | 2018-08-14 |
| 10005025 | Corrosion resistant abatement system | Monika Agarwal, Hamid Mohiuddin, Kadthala Ramaya Narendrnath | 2018-06-26 |
| 9823133 | EMI/RF shielding of thermocouples | Bopanna Ichettria, Ashish Bhatnagar, Cariappa Baduvamanda | 2017-11-21 |
| 9613846 | Pad design for electrostatic chuck surface | Cheng-Hsiung Tsai, Robert T. Hirahara, Kadthala Ramaya Narendrnath, Manjunatha Koppa, Ross Marshall | 2017-04-04 |
| 9349630 | Methods and apparatus for electrostatic chuck repair and refurbishment | Robert T. Hirahara | 2016-05-24 |
| 5120776 | Process for chemical treatment of discontinuous cellulosic fibers and composites of polyethylene and treated fibers | Bohuslav V. Kokta | 1992-06-09 |