Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7591907 | Apparatus for hybrid chemical processing | Ling Chen, Vincent Ku, Mei Chang, Hua Chung | 2009-09-22 |
| 7588736 | Apparatus and method for generating a chemical precursor | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2009-09-15 |
| 7524374 | Method and apparatus for generating a precursor for a semiconductor processing system | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2009-04-28 |
| 7402210 | Apparatus and method for hybrid chemical processing | Ling Chen, Vincent Ku, Mei Chang, Hua Chung | 2008-07-22 |
| 7270709 | Method and apparatus of generating PDMAT precursor | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2007-09-18 |
| 7228873 | Valve design and configuration for fast delivery system | Vincent Ku, Ling Chen | 2007-06-12 |
| 7204886 | Apparatus and method for hybrid chemical processing | Ling Chen, Vincent Ku, Mei Chang, Hua Chung | 2007-04-17 |
| 7066194 | Valve design and configuration for fast delivery system | Vincent Ku, Ling Chen | 2006-06-27 |
| 6955211 | Method and apparatus for gas temperature control in a semiconductor processing system | Vincent Ku, Ling Chen, Alan Ouye, Irena H. Wysok | 2005-10-18 |
| 6916398 | Gas delivery apparatus and method for atomic layer deposition | Ling Chen, Vincent Ku, Hua Chung, Alan Ouye, Norman Nakashima | 2005-07-12 |
| 6905541 | Method and apparatus of generating PDMAT precursor | Ling Chen, Vincent Ku, Hua Chung, Christophe Marcadal, Seshadri Ganguli +3 more | 2005-06-14 |