Issued Patents All Time
Showing 26–33 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7166524 | Method for ion implanting insulator material to reduce dielectric constant | Amir Al-Bayati, Rick J. Roberts, Kenneth S. Collins, Ken MacWilliams, Hiroji Hanawa +2 more | 2007-01-23 |
| 7137354 | Plasma immersion ion implantation apparatus including a plasma source having low dissociation and low minimum plasma voltage | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Andrew Nguyen, Amir Al-Bayati +1 more | 2006-11-21 |
| 7109098 | Semiconductor junction formation process including low temperature plasma deposition of an optical absorption layer and high speed optical annealing | Kartik Ramaswamy, Hiroji Hanawa, Kenneth S. Collins, Kai Ma, Vijay Parihar +4 more | 2006-09-19 |
| 7094670 | Plasma immersion ion implantation process | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Andrew Nguyen, Amir Al-Bayati | 2006-08-22 |
| 7037813 | Plasma immersion ion implantation process using a capacitively coupled plasma source having low dissociation and low minimum plasma voltage | Kenneth S. Collins, Hiroji Hanawa, Kartik Ramaswamy, Andrew Nguyen, Amir Al-Bayati +1 more | 2006-05-02 |
| 6965116 | Method of determining dose uniformity of a scanning ion implanter | Dennis W. Wagner, Peter Kindersley, David Eugene Aberle, Jonathon Yancey Simmons | 2005-11-15 |
| 6893907 | Fabrication of silicon-on-insulator structure using plasma immersion ion implantation | Dan Maydan, Randir P. S. Thakur, Kenneth S. Collins, Amir Al-Bayati, Hiroji Hanawa +2 more | 2005-05-17 |
| 6639231 | Method of obtaining a performance parameter for an ion implanter and an ion implanter employing the method | Jonathon Yancey Simmons, David Eugene Aberle | 2003-10-28 |