Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7910491 | Gapfill improvement with low etch rate dielectric liners | Young Soo Kwon, Anchuan Wang, Young S. Lee, Mihaela Balseanu, Li-Qun Xia +1 more | 2011-03-22 |
| 7754610 | Process for etching tungsten silicide overlying polysilicon particularly in a flash memory | Kyeong-Tae Lee, Jinhan Choi, Shashank Deshmukh, Meihua Shen, Thorsten Lill +1 more | 2010-07-13 |
| 6756313 | Method of etching silicon nitride spacers with high selectivity relative to oxide in a high density plasma chamber | Jinhan Choi, Nam Hun Kim | 2004-06-29 |