Issued Patents All Time
Showing 51–59 of 59 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6607640 | Temperature control of a substrate | Darryl Angelo, Tse-Yong Yao, Peijun Ding | 2003-08-19 |
| 6580057 | Enhanced cooling IMP coil support | Richard Hong, James Tsung, Gunnar Vatvedt, Peijun Ding | 2003-06-17 |
| 6458251 | Pressure modulation method to obtain improved step coverage of seed layer | Darryl Angelo, Peijun Ding, Barry Chin, Imran Hasim | 2002-10-01 |
| 6454919 | Physical vapor deposition apparatus with deposition and DC target power control | Dinesh Saigal | 2002-09-24 |
| 6376807 | Enhanced cooling IMP coil support | Richard Hong, James Tsung, Gunnar Vatvedt, Peijun Ding | 2002-04-23 |
| 6375743 | Method for improved chamber bake-out and cool-down | Dinesh Saigal, Peijun Ding | 2002-04-23 |
| 6235163 | Methods and apparatus for ionized metal plasma copper deposition with enhanced in-film particle performance | Darryl Angelo, Peijun Ding, James Tsung, Ilyoung Richard Hong, Barry Chin | 2001-05-22 |
| 6193811 | Method for improved chamber bake-out and cool-down | Dinesh Saigal, Peijun Ding, James Van Gogh | 2001-02-27 |
| 6177350 | Method for forming a multilayered aluminum-comprising structure on a substrate | Dinesh Saigal | 2001-01-23 |