Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322633 | Electrostatic chuck with improved temperature control | Hanish Kumar Panavalappil Kumarankutty, Sean M. Seutter, Sudhir Gondhalekar, Wendell Glenn Boyd, Jr., Badri Narayan Ramamurthi +2 more | 2025-06-03 |
| 11984302 | Magnetic-material shield around plasma chambers near pedestal | Job George Konnoth Joseph, Sathya Swaroop Ganta, Kallol Bera, Andrew Nguyen, Jay D. Pinson, II +6 more | 2024-05-14 |