| 10199224 |
Method for improving CD micro-loading in photomask plasma etching |
Zhigang Mao, Xiaoyi Chen, Ajay Kumar |
2019-02-05 |
| 10170277 |
Apparatus and methods for dry etch with edge, side and back protection |
Saravjeet Singh, Graeme Scott, Ajay Kumar |
2019-01-01 |
| 9978632 |
Direct lift process apparatus |
Khiem K. Nguyen, Saravjeet Singh |
2018-05-22 |
| 9754765 |
Electrodes for etch |
Banqiu Wu, Saravjeet Singh, Ajay Kumar |
2017-09-05 |
| 9425062 |
Method for improving CD micro-loading in photomask plasma etching |
Zhigang Mao, Xiaoyi Chen, Ajay Kumar |
2016-08-23 |
| 8778574 |
Method for etching EUV material layers utilized to form a photomask |
Keven Yu, Madhavi R. Chandrachood, Ajay Kumar |
2014-07-15 |
| 8568553 |
Method and apparatus for photomask plasma etching |
Ajay Kumar, Madhavi R. Chandrachood, Richard Lewington, Darin Bivens, Sheeba J. Panayil +1 more |
2013-10-29 |
| 7964818 |
Method and apparatus for photomask etching |
Elmira Ryabova, Richard Lewington, Madhavi R. Chandrachood, Darin Bivens |
2011-06-21 |
| 7943005 |
Method and apparatus for photomask plasma etching |
Ajay Kumar, Madhavi R. Chandrachood, Richard Lewington, Darin Bivens, Sheeba J. Panayil +1 more |
2011-05-17 |
| 7909961 |
Method and apparatus for photomask plasma etching |
Ajay Kumar, Madhavi R. Chandrachood, Richard Lewington, Darin Bivens, Sheeba J. Panayil +1 more |
2011-03-22 |
