Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199224 | Method for improving CD micro-loading in photomask plasma etching | Xiaoyi Chen, Amitabh Sabharwal, Ajay Kumar | 2019-02-05 |
| 9425062 | Method for improving CD micro-loading in photomask plasma etching | Xiaoyi Chen, Amitabh Sabharwal, Ajay Kumar | 2016-08-23 |
| 7208420 | Method for selectively etching an aluminum containing layer | Shenjian Liu | 2007-04-24 |