Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10595365 | Chamber lid heater ring assembly | Alan Ouye, Graeme Scott, Michael N. Grimbergen | 2020-03-17 |
| 9159574 | Method of silicon etch for trench sidewall smoothing | Ajay Kumar | 2015-10-13 |
| 8778574 | Method for etching EUV material layers utilized to form a photomask | Madhavi R. Chandrachood, Amitabh Sabharwal, Ajay Kumar | 2014-07-15 |