Issued Patents All Time
Showing 26–38 of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6589717 | Photon assisted deposition of hard mask formation for use in manufacture of both devices and masks | Bruno M. LaFontaine, Bhanwar Singh | 2003-07-08 |
| 6528398 | Thinning of trench and line or contact spacing by use of dual layer photoresist | Bhanwar Singh, Angela T. Hui | 2003-03-04 |
| 6501555 | Optical technique to detect etch process termination | Bhanwar Singh, Angela T. Hui | 2002-12-31 |
| 6500587 | Binary and attenuating phase-shifting masks for multiple wavelengths | Bhanwar Singh, Carl P. Babcock | 2002-12-31 |
| 6475867 | Method of forming integrated circuit features by oxidation of titanium hard mask | Angela T. Hui, Bhanwar Singh | 2002-11-05 |
| 6433854 | Method of illumination uniformity in photolithographic systems | Daniel C. Baker, Satyendra Sethi | 2002-08-13 |
| 6410421 | Semiconductor device with anti-reflective structure and methods of manufacture | Samit Sengupta | 2002-06-25 |
| 6403500 | Cross-shaped resist dispensing system and method | James Yu, Bhanwar Singh | 2002-06-11 |
| 6313542 | Method and apparatus for detecting edges under an opaque layer | Dipankar Pramanik, Satyendra Sethi, Daniel C. Baker | 2001-11-06 |
| 6262795 | Apparatus and method for the improvement of illumination uniformity in photolithographic systems | Daniel C. Baker, Satyendra Sethi | 2001-07-17 |
| 6057587 | Semiconductor device with anti-reflective structure | Samit Sengupta | 2000-05-02 |
| 5952135 | Method for alignment using multiple wavelengths of light | Satyendra Sethi, Daniel C. Baker | 1999-09-14 |
| 5852497 | Method and apparatus for detecting edges under an opaque layer | Dipankar Pramanik, Satyendra Sethi, Daniel C. Baker | 1998-12-22 |