Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6936383 | Method of defining the dimensions of circuit elements by using spacer deposition techniques | Martin Mazur, Carsten Hartig | 2005-08-30 | $5,346,000 |
| 6927161 | Low-k dielectric layer stack including an etch indicator layer for use in the dual damascene technique | Hartmut Ruelke, Christof Streck | 2005-08-09 | $9,550,000 |
| 6365423 | Method of inspecting a depth of an opening of a dielectric material layer | Frank Heinlein | 2002-04-02 | $3,760,000 |