Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6720242 | Method of forming a substrate contact in a field effect transistor formed over a buried insulator layer | Gert Burbach, Johannes Groschopf, Gotthard Jungnickel, Hartmut Ruelke, Carsten Hartig | 2004-04-13 |
| 6365423 | Method of inspecting a depth of an opening of a dielectric material layer | Georg Sulzer | 2002-04-02 |