Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298660 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Daijiro AKAGI, Hiroaki IWAOKA, Toshiyuki Uno, Michinori Suehara, Keishi TSUKIYAMA | 2025-05-13 |
| 12235575 | Reflective mask blank for EUV lithography and substrate with conductive film | Yusuke Ono, Hiroshi Hanekawa | 2025-02-25 |
| 12216397 | Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof | Daijiro AKAGI, Toshiyuki Uno, Ichiro Ishikawa, Kenichi Sasaki | 2025-02-04 |
| 12038685 | Reflective mask blank for EUV lithography | Hiroyoshi Tanabe, Toshiyuki Uno, Hiroshi Hanekawa, Daijiro AKAGI | 2024-07-16 |
| 11982935 | Reflective mask blank for EUV lithography | Hiroshi Hanekawa, Toshiyuki Uno, Masafumi AKITA | 2024-05-14 |
| 11953822 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Daijiro AKAGI, Hiroaki IWAOKA, Toshiyuki Uno, Michinori Suehara, Keishi TSUKIYAMA | 2024-04-09 |
| 11934093 | Reflective mask blank for EUV lithography and substrate with conductive film | Yusuke Ono, Hiroshi Hanekawa | 2024-03-19 |
| 11822229 | Reflective mask blank for EUV lithography, mask blank for EUV lithography, and manufacturing methods thereof | Daijiro AKAGI, Toshiyuki Uno, Ichiro Ishikawa, Kenichi Sasaki | 2023-11-21 |
| 11698580 | Reflective mask blank for EUV lithography | Hiroyoshi Tanabe, Toshiyuki Uno, Hiroshi Hanekawa, Daijiro AKAGI | 2023-07-11 |
| 11036127 | Reflective mask blank and reflective mask | Hiroshi Hanekawa, Toshiyuki Uno | 2021-06-15 |
| 10654746 | Glass plate with antireflection film | Kenichi Suzuki, Nobutaka Aomine | 2020-05-19 |
| 10634887 | Protective film, reflective member, and method for producing protective film | Naoko Okada, Nobutaka Aomine, Hiroshi Hanekawa | 2020-04-28 |
| 10618838 | Heat insulating glass unit for vehicle | Ryota Nakamura, Kenichi Suzuki, Nobutaka Aomine | 2020-04-14 |
| 10576713 | Heat insulating glass unit for vehicle and manufacturing method thereof | Ryota Nakamura, Kenichi Suzuki, Nobutaka Aomine | 2020-03-03 |
| 10239783 | Method of producing glass substrate and glass substrate | Hiroshi Hanekawa, Nobutaka Aomine, Yuki Aoshima, Kazunobu Maeshige | 2019-03-26 |
| 10204767 | Plasma source for a plasma CVD apparatus and a manufacturing method of an article using the plasma source | Nobutaka Aomine, Kazunobu Maeshige, Yuki Aoshima, Hiroshi Hanekawa | 2019-02-12 |
| 9988303 | Coating film-equipped glass substrate, and method for producing coating film-equipped glass substrate | Hiroshi Hanekawa, Nobutaka Aomine, Yuki Aoshima, Kazunobu Maeshige | 2018-06-05 |
| 9922805 | Plasma source for a plasma CVD apparatus and a manufacturing method of an article using the plasma source | Nobutaka Aomine, Kazunobu Maeshige, Yuki Aoshima, Hiroshi Hanekawa | 2018-03-20 |