Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11982935 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Hiroshi Hanekawa, Toshiyuki Uno | 2024-05-14 |
| 11697269 | Transparent substrate with laminated film | Akiyo Matsumoto, Masanobu ISSHIKI | 2023-07-11 |