Issued Patents All Time
Showing 1–19 of 19 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12235575 | Reflective mask blank for EUV lithography and substrate with conductive film | Yusuke Ono, Hirotomo Kawahara | 2025-02-25 |
| 12216398 | Reflective mask blank and reflective mask | Hiroyoshi Tanabe, Toshiyuki Uno | 2025-02-04 |
| 12124164 | Reflective mask blank and reflective mask | Daijiro AKAGI, Takuma Kato, Keishi TSUKIYAMA, Toshiyuki Uno, Ryusuke OISHI +3 more | 2024-10-22 |
| 12038685 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Hiroyoshi Tanabe, Toshiyuki Uno, Daijiro AKAGI | 2024-07-16 |
| 12032280 | Reflective mask blank, reflective mask, and method for manufacturing reflective mask | Taiga FUDETANI, Yusuke Ono, Shunya TAKI | 2024-07-09 |
| 11982935 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Toshiyuki Uno, Masafumi AKITA | 2024-05-14 |
| 11934093 | Reflective mask blank for EUV lithography and substrate with conductive film | Yusuke Ono, Hirotomo Kawahara | 2024-03-19 |
| 11914283 | Reflective mask blank and reflective mask | Hiroyoshi Tanabe, Toshiyuki Uno | 2024-02-27 |
| 11703751 | Reflective mask blank and reflective mask | Tsuyoshi Kakuta, Yoichi SERA, Sadatatsu Ikeda | 2023-07-18 |
| 11698580 | Reflective mask blank for EUV lithography | Hirotomo Kawahara, Hiroyoshi Tanabe, Toshiyuki Uno, Daijiro AKAGI | 2023-07-11 |
| 11150550 | Reflective mask blank and reflective mask | Tsuyoshi Kakuta, Yoichi SERA, Sadatatsu Ikeda | 2021-10-19 |
| 11036127 | Reflective mask blank and reflective mask | Hirotomo Kawahara, Toshiyuki Uno | 2021-06-15 |
| 10634887 | Protective film, reflective member, and method for producing protective film | Naoko Okada, Nobutaka Aomine, Hirotomo Kawahara | 2020-04-28 |
| 10241390 | Reflective mask blank and process for producing the reflective mask blank | — | 2019-03-26 |
| 10239783 | Method of producing glass substrate and glass substrate | Nobutaka Aomine, Yuki Aoshima, Hirotomo Kawahara, Kazunobu Maeshige | 2019-03-26 |
| 10204767 | Plasma source for a plasma CVD apparatus and a manufacturing method of an article using the plasma source | Hirotomo Kawahara, Nobutaka Aomine, Kazunobu Maeshige, Yuki Aoshima | 2019-02-12 |
| 9988303 | Coating film-equipped glass substrate, and method for producing coating film-equipped glass substrate | Nobutaka Aomine, Hirotomo Kawahara, Yuki Aoshima, Kazunobu Maeshige | 2018-06-05 |
| 9927693 | Reflective mask blank and process for producing the reflective mask blank | Junichi Kageyama, Kazuyuki Hayashi | 2018-03-27 |
| 9922805 | Plasma source for a plasma CVD apparatus and a manufacturing method of an article using the plasma source | Hirotomo Kawahara, Nobutaka Aomine, Kazunobu Maeshige, Yuki Aoshima | 2018-03-20 |