Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12339580 | Reflective mask blank for EUV lithography and substrate equipped with conductive film | Yusuke Ono, Hiroaki IWAOKA | 2025-06-24 |
| 12032280 | Reflective mask blank, reflective mask, and method for manufacturing reflective mask | Hiroshi Hanekawa, Yusuke Ono, Shunya TAKI | 2024-07-09 |