Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12346018 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Yuya Nagata, Daijiro AKAGI, Kenichi Sasaki | 2025-07-01 |
| 12339580 | Reflective mask blank for EUV lithography and substrate equipped with conductive film | Yusuke Ono, Taiga FUDETANI | 2025-06-24 |
| 12298660 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Hirotomo Kawahara, Daijiro AKAGI, Toshiyuki Uno, Michinori Suehara, Keishi TSUKIYAMA | 2025-05-13 |
| 12235574 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Yuya Nagata, Daijiro AKAGI, Kenichi Sasaki | 2025-02-25 |
| 12222640 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Shunya TAKI, Daijiro AKAGI, Ichiro Ishikawa | 2025-02-11 |
| 12105412 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Daijiro AKAGI, Wataru Nishida, Ichiro Ishikawa, Kenichi Sasaki | 2024-10-01 |
| 12001134 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Yuya Nagata, Daijiro AKAGI, Kenichi Sasaki | 2024-06-04 |
| 11953822 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Hirotomo Kawahara, Daijiro AKAGI, Toshiyuki Uno, Michinori Suehara, Keishi TSUKIYAMA | 2024-04-09 |
| 11829065 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Shunya TAKI, Daijiro AKAGI, Ichiro Ishikawa | 2023-11-28 |
| 10287676 | Thin film formation method, thin film, and glass plate having thin film attached thereto | Atsushi Seki, Kousuke Chonan, Reo Usui, Toshio Suzuki, Tomomi Abe | 2019-05-14 |