Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12105412 | Reflective mask blank, reflective mask, method of manufacturing reflective mask blank, and method of manufacturing reflective mask | Daijiro AKAGI, Hiroaki IWAOKA, Ichiro Ishikawa, Kenichi Sasaki | 2024-10-01 |
| 7718926 | Film deposition apparatus, film deposition method, monitoring program for film deposition apparatus, and recording medium thereof | Yutaka Matsuzawa, Hideaki Mito, Yoshinori Takamori | 2010-05-18 |
| 7115186 | Liquid material evaporation apparatus for semiconductor manufacturing | Hideaki Miyamoto, Tetsuo Shimizu | 2006-10-03 |