Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12298660 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Hirotomo Kawahara, Daijiro AKAGI, Hiroaki IWAOKA, Toshiyuki Uno, Michinori Suehara | 2025-05-13 |
| 12124164 | Reflective mask blank and reflective mask | Daijiro AKAGI, Takuma Kato, Toshiyuki Uno, Hiroshi Hanekawa, Ryusuke OISHI +3 more | 2024-10-22 |
| 11953822 | Reflective mask blank for EUV lithography, reflective mask for EUV lithography, and method for manufacturing same | Hirotomo Kawahara, Daijiro AKAGI, Hiroaki IWAOKA, Toshiyuki Uno, Michinori Suehara | 2024-04-09 |