Issued Patents All Time
Showing 26–40 of 40 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8487281 | Electron beam exposure apparatus and electron beam exposure method | Akio Yamada, Tatsuro Okawa | 2013-07-16 |
| 8479277 | Information processing apparatus, information processing system, and computer readable medium | Yoshiyuki Yoda, Eiji Shimoichi, Yuriko Inakawa, Eiji Nishi, Noriyuki Tatsuma +5 more | 2013-07-02 |
| 8384052 | Electron beam lithography apparatus and electron beam lithography method | Akio Yamada | 2013-02-26 |
| 8154746 | Information communication system, sending device, receiving device, recording medium storing transmission control program, recording medium storing reception control program, data signal embodied in carrier wave, sending method, and receiving method | Akira Okamoto, Yuriko Inakawa, Jun Wakamatsu, Eiji Nishi, Fumio Harada +3 more | 2012-04-10 |
| 8097314 | Fluororesin tube and process for producing the same | — | 2012-01-17 |
| 7979467 | Information processing device, information management device, information processing system and computer readable medium | Akihide Oshima, Eiji Shimoichi, Yuriko Inakawa, Eiji Nishi, Noriyuki Tatsuma +5 more | 2011-07-12 |
| 7768666 | Device, device processing history storage system and device processing history storing method | Akira Okamoto, Jun Wakamatsu, Noriyuki Tatsuma, Eiji Nishi, Atsuhiro Itoh +2 more | 2010-08-03 |
| 7651749 | Fluororesin tube for fixing member for copier and printer | Kei Nanbu, Shinji HARUYAMA | 2010-01-26 |
| 7648895 | Vertical CVD apparatus for forming silicon-germanium film | Katsuhiko Komori, Norifumi Kimura, Kazuhide Hasebe, Takehiko Fujita, Akitake Tamura +1 more | 2010-01-19 |
| 7613412 | Device and job history display control method | Fumio Harada, Yuriko Inakawa, Atsuhiro Itoh, Jun Wakamatsu, Noriyuki Tatsuma +2 more | 2009-11-03 |
| 7375356 | Electron-beam exposure system | — | 2008-05-20 |
| 7273818 | Film formation method and apparatus for semiconductor process | Norifumi Kimura, Takehiko Fujita, Yoshikazu Furusawa, Katsuhiko Komori, Kazuhide Hasebe | 2007-09-25 |
| 7164141 | Charged particle beam photolithography machine, standard substrate for correcting misalignment factor of charged particle beam photolithography machine, correcting method for charged particle beam photolithography machine, and method of manufacturing electronic device | — | 2007-01-16 |
| 6703630 | Exposure method, electron beam exposure apparatus and fabrication method of electronic device | — | 2004-03-09 |
| 6407398 | Electron beam exposure apparatus and exposure method | Tatsuro Ohkawa, Yoshihisa Ooae | 2002-06-18 |