Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9607807 | Charged particle beam exposure apparatus suitable for drawing on line patterns, and exposure method using the same | Akio Yamada, Masahiro Seyama, Masaki Kurokawa | 2017-03-28 |
| 8487281 | Electron beam exposure apparatus and electron beam exposure method | Masaki Kurokawa, Akio Yamada | 2013-07-16 |